Hybrid Laser Manufacturing of Flexible Electronics and System Integration

Kaichen Xu^*

^* State Key Laboratory of Fluid Power and Mechatronic Systems, School of Mechanical Engineering, Zhejiang University (xukc@zju.edu.cn)

Abstract

Flexible sensors, as one of the important categories of flexible electronics, present intrinsic merits than traditional rigid devices. They play a crucial role in the Internet of Things, artificial intelligence etc. Based on the integrated design and manufacturing strategy of "structure-material-function", this work proposes a hybrid manufacturing method based on laser processing for functional array or multi-mode integration of various flexible sensors. Through model building, principle breakthrough and structure innovation, the problems of poor stability and low accuracy of the flexible sensor are resolved. A number of multifunctional sensing systems such as flexible thermal flow sensor array, multi-mode ultra-thin bioelectronics, etc. have been developed. Their applications in human-machine-environment interactions, implantable medical devices, fabric integrated electronics and advanced equipment have been explored.

Figure 1: Advanced laser manufacturing of flexible sensors and system integration