17758013020 Chen Chen
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17816169069 Jinglin Jian
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Qinglei Guo
Qinglei Guo is a professor in the School of Integrated Circuits at Shandong University, China. He received his PhD degree from the Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China, in 2015. He completed postdoctoral research at Fudan University, China, and the University of Illinois at Urbana-Champaign. His research interests focus on developing advanced materials and technologies to construct unusual electronic devices or systems, such as flexible/wearable electronics, bioresorbable transient electronics, wide-bandgap semiconductor devices and integration, etc.
Transferable Inorganic Semiconductor Membranes for Flexible/Transient Electronics
Qinglei Guo*
* School of Integrated Circuits, Shandong University, Jinan 250100, China
(qlguo@sdu.edu.cn)
Abstract
The rapid development of material science and semiconductor technology are promoting integrated circuits (ICs) into the post-Moore era, and a universal perspective holds that silicon is no longer suitable for extending the Moore’s law. One of the most compelling opportunities for future directions involves the use of silicon, in an ultra-thin format, i.e., silicon membranes, for constructing unusual devices or systems with features of large-area coverage, mechanically flexible, and/or physically transient. These unusual silicon-based electronics are normally named as flexible electronics, which strongly supports the developing route of “More-than-Moore”. Specifically, silicon membranes have practical appeal because of their unique physical properties and natural compatibility with current semiconductor technology, thus enabling the scalable manufacturing of various functionalized flexible electronic devices with capabilities of sensing, communicating, powering, or others. In this work, we will present our efforts on the developing assembly strategies and fabrications for the construction of silicon-based flexible electronics, with emphases on the transfer of ultra-thin silicon/germanium membranes and their applications in flexible/transient electronics. We modified traditioanl transfer printing technique to realize the large-area assembly of 1D ribbons, controllable cracking of 2D membranes, and 3D membrane stacks. Then, flexible or stretchable electronic devices, including biosensors, photodetectors, dual-parameter sensors, and transient power supply devices will be fabricated and exhibited. These results will pave the way for the development of inorganic semiconductor-based flexible electronics, which strongly supports the developing route of “More-than-Moore” in the already arrived post-Moore era.
